Watch industry is developing new innovative product using silicon based technology. Such parts are adapted to DHM® inspection both at component level or wafer level.
The goal of the measurement is to evaluate the out of plane displacement of the oscillator during one cycle. The DHM® is measuring the dynamic topography, this unique set of data includes both rotation and out-of-plane information.
Image processing enables image registration to focus on out of plane vibrations. The amplitude map bellow shows the out-of-plane vibration amplitude on the entire image when the plot shows the temporal evolution of out-of-plane displacement.