MEMS 悬臂梁

Efficient mode characterization

Cantilevers are  operated  in air, liquid, and under vacuum. Multi-frequency excitation, torsional modes and geometry optimization of cantilevers requires efficient comparison between simulation and experimental data. Cantilever tips have often large and fast vertical  displacements.

Dynamic topography & Vibrations maps

Using the Holographic MEMS Analyzer, MEMS designer visualize in real time the 3D shape of the cantilever by changing the excitation frequency and voltage. Both time response and frequency response are accessible. This unique set of data enables you to fully characterize your cantilever dynamic response.

• Time response in 3D
• Amplitude and Phase vibrations maps

The DHM^® enables a representation of the vibration over the sample with a lateral resolution only limited by diffraction. Point sensors as the laser doppler vibrometer cannot resolved such detailed.