Surface acoustic waves have received considerable attention recently and many devices are now being incorporated in electronic systems, sensors, bio-devices, and touchscreen displays.
Measurement of waves geometry, amplitude, homogeneity, are needed to investigate new design and to optimize devices geometries for new applications.
The Holographic MEMS Analyzer is the perfect instrument to address such measurement. The high vertical and lateral resolution enable to resolve wave propagation overt he entire field of view.
Vibrations amplitude are smaller than topography features 5 nm versus 150 nm. Computing vibrations sequence enable the visulaization
Full field of view measurement and high vertical resolution provide immediately a dynamical representation of surface 3D acoustic wavefield. It enables to investigate
Out-of-plane vibrations enable analysis of device vibration at a given frequency. Amplitude and phase map give information on the generated acoustic wave. The phase map shows a spherical wave generated, amplitude gives information about wave amplitude, homogeneity and attenuation.
Amplitude and phase map give information on the generated acoustic wave. A planar wave is generated on each side of the device, destructive interference occurs in the corners.